Silicon Carbide (SiC) – Ceramic Products

Silicon carbide (SiC) ceramics are high-performance advanced ceramic materials with extremely high hardness, excellent high-temperature resistance, high thermal conductivity, and outstanding chemical stability. They are widely used in semiconductor, photovoltaic, mechanical seal, and high-temperature industrial applications.

InnoTech offers silicon carbide ceramic products manufactured via multiple sintering processes, including Reaction Bonded SiC (RBSiC), Pressureless Sintered SiC (SSiC), and Hot Pressed SiC (HPSiC), addressing diverse industrial application requirements.

SiC Substrates

High-purity silicon carbide ceramic substrates offer excellent thermal conductivity, a low coefficient of thermal expansion (CTE), and high electrical insulation, making them ideal thermal management substrate materials for power electronics and LED packaging.

LED Packaging Power Devices Circuit Substrates
  • Ultra-large format, available in sizes up to 400 × 400 mm
  • High dimensional accuracy and flatness
  • Excellent electrical and thermal properties
  • Ultra-high strength

SiC Wafer Boats

Silicon carbide tile boats, 6-inch SiC wafer boats, 8-inch SiC wafer boats, 12-inch SiC wafer boats, and SiC boat supports offer exceptional thermal stability and corrosion resistance. They maintain structural integrity without deformation at high temperatures (exceeding 1,600°C) and in highly corrosive environments, with a service life exceeding five years.

Semiconductor Manufacturing High-Efficiency Battery Technology Solar PV
  • High Strength
  • High Hardness
  • High Temperature Shock Resistance
  • High Corrosion Resistance

SiC Precision Lapping Components

Including precision grinding components such as lapping plates and carriers, these products offer extremely high hardness and wear resistance, making them suitable for precision processing of hard and brittle materials like silicon wafers and sapphire.

Semiconductor & Electronics Industry Precision Optical Components Industrial Lapping
  • High Strength
  • High Hardness
  • High Purity
  • High Dimensional Accuracy

SiC Thermal Components

Including thermal components such as furnace tubes and heat exchanger tubes (custom sizes available), these products offer excellent high-temperature resistance, corrosion resistance, and thermal shock performance, making them suitable for extreme high-temperature environments.

Solar PV Heat Exchangers Chemical Metallurgy
  • High Strength
  • High Thermal Conductivity
  • High Corrosion Resistance
  • Large Format Sizes