Silicon Nitride (Si₃N₄) – Ceramic Products

Silicon nitride ceramics are high-performance advanced ceramic materials offering excellent mechanical strength, high-temperature resistance, corrosion resistance, and wear resistance, combined with superior thermal shock stability and a low coefficient of thermal expansion (CTE).

InnoTech offers silicon nitride ceramics produced via multiple processes, including Reaction Bonded Silicon Nitride (RBSN), Hot Pressed Silicon Nitride (HPSN), and Gas Pressure Sintered Silicon Nitride (GPSN), serving machinery, electronics, chemical, and energy industries.

Si₃N₄ Substrates

Silicon nitride substrates are high-performance ceramic substrates featuring high thermal conductivity, high strength, high hardness, high resistivity, excellent thermal shock resistance, low dielectric loss, and a low CTE.

IC Heat Dissipation LED Heat Dissipation High-Frequency Filters
  • High Thermal Conductivity
  • High Strength
  • Large Format Sizes
  • Excellent Flatness

AMB Si₃N₄ Substrates

Active Metal Brazing (AMB) forms a chemical bond between the ceramic and metal layers through a high-temperature brazing process in which active metals react with the ceramic surface. AMB silicon nitride substrates combine high thermal conductivity, high strength, and excellent CTE matching with high current-carrying capacity, high integration, and outstanding reliability. Chemical etching enables complex circuit designs on AMB ceramic substrates, simplifying the package structure.

SiC Power Modules for EVs Rail Transit Inverters PV Inverters
  • Excellent Electrical Properties
  • Thermal Shock Resistance
  • High Bonding Strength
  • Customizable Copper Thickness

Si₃N₄ Structural Components

Low CTE, high thermal conductivity, high strength and toughness, high surface precision, plasma corrosion resistance more than three times that of alumina, service life exceeding 50,000 hours, and excellent chemical stability.

Electrostatic Chuck Base Etch Ring Probe Card Guide Plate
  • Ultra-High Strength
  • High Toughness
  • High Corrosion Resistance
  • High Precision

Si₃N₄ Bearings & Balls

Silicon nitride bearings and bearing balls are precision ceramics sintered at high temperature in a non-oxidizing atmosphere. They feature low density, high strength, superior wear and corrosion resistance, high-temperature stability, electrical insulation, and non-magnetic properties, operating reliably under extreme conditions including high and low temperatures, vacuum, and corrosive environments.

Automotive Bearings Wind Turbine Insulated Bearings Spindle Bearings
  • Ultra-High Strength
  • High Hardness
  • Ultra-High Dimensional Accuracy
  • Ultra-High Insulation

Si₃N₄ Pumps, Valves & Seals

Silicon nitride ceramic valves, pumps, and seals are industrial components designed for high-temperature, high-pressure, and highly corrosive and abrasive environments.

Semiconductor & New Energy Pipeline Systems Biochemical & Medical Fluid Transport
  • High Strength
  • High Toughness
  • Excellent Sealing Performance
  • Corrosion Resistance

Si₃N₄ Grinding Media & Wear Liners

Silicon nitride ceramics offer high hardness, wear resistance, corrosion resistance, high-temperature stability, and excellent chemical stability, making them ideal for premium grinding media and mill liners. Compared to zirconia, Si₃N₄ exhibits an order-of-magnitude lower wear rate, delivering extended service life and minimal contamination—essential for maintaining the purity of ultra-high-purity materials.

Semiconductor Grinding Advanced Ceramic Powder Grinding High-Temperature Metal Powder Grinding
  • High Strength
  • High Toughness
  • High Wear Resistance
  • High Purity